专利名称：Method for measuring transmittance of
optical members for ultraviolent use,synthetic silica glass, and photolithographyapparatus using the same
发明人：Akiko Yoshida,Norio Komine,Hiroki Jinbo申请号：US09538965申请日：20000331公开号：US06320661B1公开日：20011120
专利附图：
摘要：A method is provided for evaluating a transmittance of an optical member for
ultraviolet use, which is an object of measurement. The method includes the steps ofcleaning the object of measurement, measuring a transmittance of the object ofmeasurement within a predetermined time period from completion of the cleaningduring which a rate of decrease in the transmittance of the object of measurementremains substantially constant, and correcting the transmittance measured in the step ofmeasuring to a transmittance at an evaluation time arbitrarily selected within thepredetermined time period in accordance with the constant rate of decrease in thetransmittance and a time at which the transmittance is measured.
申请人：NIKON CORPORATION
代理机构：Morgan, Lewis & Bockius LLP
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容