Low-Voltage Mems Oscillator

专利名称：Low-Voltage Mems Oscillator发明人：Jean-Claude Six申请号：US11910859申请日：20060331

公开号：US20080272852A1公开日：20081106

专利附图：

摘要：An electronic device for generating an electric oscillating signal is describedbased on a micro-electromechanical system (MEMS). The electronic device typicallycomprises a substrate () a moveable element () which is moveable with respect to thesubstrate () and an actuating means and a sensor. The actuating means is used to induce

vibration of the moveable element () and comprises two inductive elements, a first oneprovided fixed to the substrate () and a second one provided fixed to the moveableelement (). The induced vibration of the moveable element () is sensed using the sensorand converted into an electric oscillating signal. The signal may be amplified and used forat least partly powering the actuating means, such that an oscillating signal at a stableresonance frequency and with a fixed amplitude can be obtained. The differentcomponents are highly integratable on chip.

申请人：Jean-Claude Six

地址：Saint Contest FR

国籍：FR

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